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Thin Film Deposition:

ADL facility has a pulsed laser deposition (PLD) system for highly stoichiometric thin film deposition. Other thin film deposition tools such as sputtering system, e-beam evaporator, plasma-enhanced chemical vapor deposition (PECVD) system are available in our nanofabrication lab in the Science 2 building. 

Binghamton University State University of New York
PO BOX 6000   Binghamton, NY 13902-6000
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The ADL is a component of the Small Scale Systems Integration and Packaging Center, a
New York State Center of Excellence. All rights reserved.

Last Updated: 6/1/12